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3Axis Right Angle Sensor

Ultra-Precise 3-Axis Displacement Measurement

Simultaneous measurement along the X, Y, and Z axes, as well as the tilt
direction, enables precise positional analysis. The non-contact measurement
method accurately acquires displacement data without damaging the target
object. Ultra-high resolution enables sensitive detection of even the smallest
changes. Optimized for high-precision process inspection in industries such as semiconductors and batteries.

  • 3-axis simultaneous measurement
  • Correction of Z [Height] data due to tilting
  • Compact Size (Ideal for robotic applications)
  • Signal Interface (SI) Support
  • Integrated telecentric lens
  • Customization Support

Main Features

1
3-axis simultaneous measurement
Simultaneous 3-axis measurement of the target object
can be easily performed using only the reflected light structure
(Mirror, IRCF) without the need for an aperture or master.
3
Compact Size (Ideal for robotic applications)
A Compact size approximately one-third the size
of competitors, intergrating three measurement
funtions (Tilt, Position, Height) for Comprehensive inspection.
2
Correction of Z [Height] data due to tilting
Automatic correction function for Z [Height]
error that can change due to tilting.
4
Signal Interface (SI) Support
Support synchronization of module control information,
as well as intergration of power and communication
sysytems tailored to customer requirements.
5
Integrated telecentric lens
HyVISION telecentric lens technology
improves measurement precision and stability.
6
Customization support
Measurement range, repeatability and linearity
can be customized for specific requirements.

Specifications


Measurement
Item
HVS Target
Position
Range±700 um
Resolution0.25 um
Repeatability1 um
Linearity2 um
Sampling rate

1k or 0.1k Hz

Laser wavelength520 nm
Beam Diameter

Φ 11.0 mm

Beam DivergenceCollimate Beam
Height
Range± 525 um
Resolution0.01 um
Repeatability1 um
Linearity0.2 um
Sampling rate1k or 0.1k Hz support
Beam Spot Diameter0.02 mm
Laser Wavelength830 nm
Working distance4.5
Size
DimensionW357 x H116.5 x D95 mm
Weight8 kg
Area (WxD)0.034 m2

Application


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